英语翻译MEMS在各个领域有着广阔的应用前景.可以说,一旦相关MEMS技术能够完全实用于各种器件的制作,它必将带来深刻的技术变革.微压力传感器在整个MEMS行业,无论是设计研究,还是产业应用

Question

英语翻译
MEMS在各个领域有着广阔的应用前景.可以说,一旦相关MEMS技术能够完全实用于各种器件的制作,它必将带来深刻的技术变革.微压力传感器在整个MEMS行业,无论是设计研究,还是产业应用中都占主要地位.就其传感原理来说,微压阻式、微电容式、微谐振式是当今微压力传感器的3种最常见的形式.微压阻式压力传感器式是结构最简单、技术相对较成熟的微压力传感器中的一种
微压阻式结构简单,制作工艺及步骤也很容易,基于压阻效应、挠度理论及其它力学、电学等MEMS所涉及的相关知识,设计了微压阻式压力传感器.与其它扩散、掺杂形成压敏电阻不同,本文设计的折弯形电阻制作在敏感薄膜上,它能增加灵敏度,减少工艺步骤,简化结构,降低成本.
关键词:微机电系统;压阻式;微传感器;

Answer 1

MEMS in various fields have broad application prospects. It can be said that once the relevant MEMS technology is fully applied to the production of various devices, it will have a profound technological change. - MEMS pressure sensor in the entire industry, whether it is design research, or industrial applications have dominated. On its sensing principle, the micro-piezoresistive, micro-capacitance, micro-resonant in today's micro-pressure sensor three kinds of the most common form. Micro-piezoresistive pressure sensor structure is the most simple and relatively mature technology-pressure sensors in a
Micro-piezoresistive simple structure, production process and steps are very easy, based on piezoresistive effect, deflection theory and other mechanical, electrical and other MEMS-related knowledge involved in the design of the micro-piezoresistive pressure sensor. And other proliferation, doping varistor different form, the paper-shaped design of bending resistance produced in the sensitive film, it can increase sensitivity, reduction of steps to simplify the structure, reduce costs.
Key words: micro-electromechanical systems; piezoresistive; micro-sensor;