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英语翻译不要机械的直译.Thispaperexaminesthesimulation,dynamictestinganddesignofmicromachinedflexiblejoints.Theobjectiveistomimicthekinematicsofclassicalmacrorotatingandslidingjointswithflexuralmicrojoints.Thejo
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英语翻译
不要机械的直译.
This paper examines the simulation,dynamic testing and design of micromachined flexible joints.The objective is to mimic the kinematics of classical macro rotating and sliding joints with flexural micro joints.The joints consist of long slender beams that are folded in a variety of shapes:`I',`H',`X',`S',`U' and `V' shaped joints are considered.Finite element modelling simulations are used to simulate rotational,axial and out-of-plane stiffness and examine the effect of variations in joint length and beam angles.The simulation results are compared to a series of dynamic tests of polysilicon micromachined joints.The resonant frequencies of joint-mass systems were measured using a non-contact laser reflectance apparatus and the derived experimental rotational stiffnesses were found to agree with simulations.Design guidelines for the selection of the optimum joint shape and length for given functional requirements such as directional stiffness,selective compliance and range of motion are presented.
1.Introduction
Surface micromachining uses sacrificial layers to form thin,
high-resolution structures on the surface of a silicon wafer with
overall dimensions in the 100–1000μmrange and feature sizes
of approximately 1–10 μm.Complex microstructures that
mimic macro-scale mechanical devices have been constructed.
As in the macro scale,the output motion can be reduced or
amplified by the use of mechanisms such as bar linkages with
sliding or rotating joints.On the micro scale,high sliding
friction and high wear rates dramatically limit the use of
members involving surface contact and sliding.
The pin joints used in macro-scale mechanisms are often
unsuitable for micro-scale devices.In their place,compliant
mechanisms with flexure joints can be used.The flexure joints
can have the form of long slender beams possibly folded so
as to be more compact.Compliant members that bend rather
than slide have been used both at the macro scale [1,2] and
at the micro scale [3–6].The function of kinematic joints
is to constrain and control the motion of connected links.
Typically,the motion is constrained in most directions (axes)
and controlled in one or two directions.
There are two main disadvantages to flexure joints:
(1) they are not totally compliant in the direction of motion,they have finite stiffness,and (2) they are not totally stiff
in the directions of the constraints.The design of surface
micromachined joints is limited by the fabrication technology
which imposes restrictions on the joint dimensions,minimum
widths and maximum thicknesses.For example,surface
micromachined structures are relatively thin compared to their
planar dimensions,with typical maximum height to width
aspect ratios of one to two.Thus such joints are relatively stiff
in-plane and relatively compliant out-of-plane,complicating
the design of flexible micromachined joints
不要机械的直译.
This paper examines the simulation,dynamic testing and design of micromachined flexible joints.The objective is to mimic the kinematics of classical macro rotating and sliding joints with flexural micro joints.The joints consist of long slender beams that are folded in a variety of shapes:`I',`H',`X',`S',`U' and `V' shaped joints are considered.Finite element modelling simulations are used to simulate rotational,axial and out-of-plane stiffness and examine the effect of variations in joint length and beam angles.The simulation results are compared to a series of dynamic tests of polysilicon micromachined joints.The resonant frequencies of joint-mass systems were measured using a non-contact laser reflectance apparatus and the derived experimental rotational stiffnesses were found to agree with simulations.Design guidelines for the selection of the optimum joint shape and length for given functional requirements such as directional stiffness,selective compliance and range of motion are presented.
1.Introduction
Surface micromachining uses sacrificial layers to form thin,
high-resolution structures on the surface of a silicon wafer with
overall dimensions in the 100–1000μmrange and feature sizes
of approximately 1–10 μm.Complex microstructures that
mimic macro-scale mechanical devices have been constructed.
As in the macro scale,the output motion can be reduced or
amplified by the use of mechanisms such as bar linkages with
sliding or rotating joints.On the micro scale,high sliding
friction and high wear rates dramatically limit the use of
members involving surface contact and sliding.
The pin joints used in macro-scale mechanisms are often
unsuitable for micro-scale devices.In their place,compliant
mechanisms with flexure joints can be used.The flexure joints
can have the form of long slender beams possibly folded so
as to be more compact.Compliant members that bend rather
than slide have been used both at the macro scale [1,2] and
at the micro scale [3–6].The function of kinematic joints
is to constrain and control the motion of connected links.
Typically,the motion is constrained in most directions (axes)
and controlled in one or two directions.
There are two main disadvantages to flexure joints:
(1) they are not totally compliant in the direction of motion,they have finite stiffness,and (2) they are not totally stiff
in the directions of the constraints.The design of surface
micromachined joints is limited by the fabrication technology
which imposes restrictions on the joint dimensions,minimum
widths and maximum thicknesses.For example,surface
micromachined structures are relatively thin compared to their
planar dimensions,with typical maximum height to width
aspect ratios of one to two.Thus such joints are relatively stiff
in-plane and relatively compliant out-of-plane,complicating
the design of flexible micromachined joints
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